OTT-CSIC: TECHNOLOGY TRANSFER OFFICE
  SPANISH COUNCIL FOR SCIENTIFIC RESEARCH   SPANISH COUNCIL FOR SCIENTIFIC RESEARCH
      TECHNOLOGY TRANSFER OFFICE
Start | TECHNOLOGY OFFER | NEWS | CONTACT | ESPAÑOL |Go Back
 
 
OTT-CSIC-> Catalogue -> Technologies by Areas -> Automation and Physics Technology ->
CSIC NM044- System and method for inspection and characterization of arrays of micro- and nanomechanical structures (MEMS/NEMS)
A Spanish public research laboratory (CSIC) has developed a new technique for characterization of the displacement, strain and vibration of arrays of micro- and nanomechanical structures such as MEMS/NEMS and microcantilevers. The technique is based on the optical beam deflection and the automated scanning of the laser beam. The technique has applications for routine characterization of strain and resonance behaviour of micro- nanomechanical structures, and biological and chemical sensors based on those structures. In particular, the Spanish laboratory envisions genomics and proteomics chips based on this technique with higher sensitivity, label-free detection and small amounts of sample required.
Specification sheet:
DESCRIPTION

A crucial element of these devices is the readout technique that ideally should satisfy i) high sensitivity for measuring the strain and vibration as well as ii) capability for readout of arrays of micro- and nanomechanical structures for simultaneous detection of different stimulus. Optical techniques based on beam deflection and interferometry have been used for measuring the relative displacement of a single point of those mechanical structures.

However, simplistic models must be assumed to deduce the strain and vibration of the overall structure. On the other hand, the optical techniques previously proposed for readout of micro- and nanomechanical arrays had important restrictions in the geometry of the mechanical strucuture, distance between micro- and nanomechanical elements, number of elements, and characterization time.

In our laboratory, an optical readout technique has been developed for real-time monitoring of the strain and vibration of arrays of micro- and nanomechanical structures. The technique is based on the automated two-dimensional scanning of a laser beam by using voice-coil actuators. Cantilever profiles are obtained with subnanometer resolution and a processing speed of about ten elements per second. We have applied this technique for real-time detection of multiple biological agents.

INNOVATIVE ASPECTS

-Combination of the optical beam deflection technique and automated control of the displacement of the laser beam.

-Laser beam motion algorithm based on two trajectories, one for automatic detection of the position of the micro- and nanomechanical elements, the other for characterization of the strain and vibration of each element.

-Application for real-time detection of biological molecules.

COMPETITIVE ADVANTAGES

-Subnanometer resolution.

-High throughput: ten micro- and nanomechanical elements per second.

-Scalable to large arrays by using several laser beams.

-Flexibility: no restrictions in the number of micro- nanomechanical elements, and gap distance.

-Applicability for fast, label free and high sensitive detection of multiple chemical and biological molecules.

-Simple implementation, friendly use and low cost.

KEYWORDS

Microelectronics, Nanotechnology, MEMS/NEMS, cantilevers, sensors, biosensors

PATENT

E05380157, applied for at 15/7/2005

CONTACT

Juan Llabrés
email: Llabres.Juan@orgc.csic.es
phone: +34 91 585 49 58

FOR MORE CSIC TECHNOLOGY OFFERS CLICK HERE

If you wish more information about the product/service, please fill-out the next form.

Tell a friend

 
 
Serrano, 113. 28006-Madrid (Spain). TEL: +34 91 585 53 01, FAX: +34 91 585 52 87, mail: ott@csic.es
CSIC.2005. It is allowed to use the text and information contained in these pages. Nevertheless, it is required previous permission of OTT-CSIC for their distribution or publication in any support accessible to third parties..